Abstract
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The incorporation of Te into the crystal lattice, when it is used as an n-type dopant for GaAs grown by metalorganic vapor phase epitaxy, is studied. For this purpose, several growth temperatures, total pressures, growth rates, and substrate misorientations have been analyzed, from which it is concluded that depending on the substrate misorientation and total pressure used, the Te behaves like a volatile dopant or a nonvolatile dopant as result of the enhancement or minimization of its adsorption onto the growth surface. | |
International
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Si |
JCR
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Si |
Title
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JOURNAL OF APPLIED PHYSICS |
ISBN
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0021-8979 |
Impact factor JCR
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2,171 |
Impact info
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Volume
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104 |
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Journal number
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0 |
From page
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114906 |
To page
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114908 |
Month
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ENERO |
Ranking
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