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Abstract
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| Continuous and long-pulse lasers have been used for the forming of metal sheets in macroscopic mechanical applications. However, for the manufacturing of micro-electromechanical systems (MEMS), the applicability of such type of lasers is limited by the long-relaxation-time of the thermal fields responsible for the forming henomena. As a consequence of such slow relaxation, the final sheet deformation state is attained only after a certain time, what makes the generated internal residual stress fieldsmore dependent on ambient conditions and mightmake difficult the subsequent assembly process from the point of view of residual stresses due to adjustment. The use of ns laser pulses provides a suitable parametermatching for the laser forming of an important range of sheet components used in MEMS that, preserving the short interaction time scale required for the predominantlymechanic (shock) induction of deformation residual stresses, allows for the successful processing of components in a medium range of miniaturization, particularly important according to its frequent use in such systems. In the present paper, a discussion is presented on the physics of laser shock microforming and the influence of the different effects on the net bending angle. The experimental setup used for the experiments, sample fabrication and experimental results of influence of number of laser pulses on the net bending angle are also presented. | |
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International
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Si |
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JCR
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Si |
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Title
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APPLIED SURFACE SCIENCE |
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ISBN
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0169-4332 |
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Impact factor JCR
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1,576 |
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Impact info
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Volume
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255 |
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Journal number
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10 |
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From page
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5633 |
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To page
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5636 |
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Month
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MARZO |
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Ranking
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