Memorias de investigación
Research Publications in journals:
High aspect-ratio SU-8 resist nano-pillar lattice by e-beam direct writing and its application for liquid trapping
Year:2009

Research Areas
  • Mechanical engineering,
  • Magnetic materials

Information
Abstract
We report the fabrication of periodic lattices of high aspect-ratio nano-pillars made of SU-8 polymeric material by using direct electron-beam writing. Process parameters are optimized in order to control proximity effects and photoacid-generator diffusion determining feature resolution and material stiffness. We demonstrate nanostructured surfaces consisting of lattices of SU-8 nano-pillars with aspectratio as high as 3.8:1, improving previous reported results significantly. We also show the capability of these structures to trap liquid¿water infiltrated among the SU-8 nano-pillars after proper chemical treatment.
International
Si
JCR
Si
Title
MICROELECTRONIC ENGINEERING
ISBN
0167-9317
Impact factor JCR
1,583
Impact info
Volume
87
doi:10.1016/j.mee.2009.09.007
Journal number
4
From page
663
To page
667
Month
ABRIL
Ranking
Participants

Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Ingeniería y Aplicaciones del Láser
  • Centro o Instituto I+D+i: Centro Laser
  • Grupo de Investigación: Grupo de Dispositivos Semiconductores del ISOM
  • Departamento: Física Aplicada a la Ingeniería Industrial