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Descripción
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| We present a nonlinear model for Bulk Acoustic Wave resonators that combines different sources of nonlinearity by use of device-independent material-specific parameters to predict intermodulation and harmonic generation. The model accounts for intrinsic nonlinearities due to the stiffened elasticity and thermal effects that arise from temperature changes in a sample driven by an amplitude-modulated signal. Nonlinear parameters of the aluminum nitride piezoelectric layer have been extracted that are in agreement with previously published results. | |
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Internacional
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Si |
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Nombre congreso
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2009 IEEE International Ultrasonics Symposium |
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Tipo de participación
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960 |
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Lugar del congreso
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Roma, Italia |
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Revisores
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Si |
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ISBN o ISSN
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1051-0117 |
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DOI
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Fecha inicio congreso
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20/09/2009 |
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Fecha fin congreso
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23/09/2009 |
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Desde la página
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880 |
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Hasta la página
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884 |
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Título de las actas
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2009 IEEE International Ultrasonics Symposium Proc. |