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Abstract
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| Metal-organic vapour phase epitaxy (MOVPE) is the most widely used technology for the growth of III-V compounds in the industry today, and has become the preferred choice for the mass fabrication of a wide range of devices. The I.E.S ¿ U.P.M acquired a research-scale Aixtron MOVPE reactor in 2000 aiming the development of III-V multi-junction concentrator solar cells in a pilot production line. In this paper, a thorough review of the MOVPE technology is presented. Then, the specific configuration, its potentialities and the research being made today at the I.E.S ¿ U.P.M is described. Finally, the achievements and future prospects are explained. | |
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International
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Si |
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Congress
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2007 Spanish Conference on Electron Devices |
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960 |
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Place
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San Lorenzo de El Escorial (Madrid) |
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Reviewers
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Si |
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ISBN/ISSN
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1-4244-0868-7 |
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Start Date
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31/01/2007 |
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End Date
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02/02/2007 |
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