Observatorio de I+D+i UPM
• ESPAÑOL
• ENGLISH
INVESTIGADORES
ESTRUCTURAS DE I+D+I
ACTIVIDAD INVESTIGADORA
INNOVACIÓN
Investigador
Jimena Olivares Roza
Categoría Investigador
TITULAR UNIVERSIDAD
Cargos actuales
SUBDIRECTOR DE CENTRO DE INVESTIGACIÓN. ADJUNTO DIRECCIÓN E.T.S..
Escuela UPM
E.T.S. DE INGENIEROS DE TELECOMUNICACION
Departamento:
INGENIERÍA ELECTRÓNICA
Centros/Institutos I+D+i
C. MATERIALES Y DISP. AVANZ. (CEMDATIC)
Area Conocimiento
TECNOLOGIA ELECTRONICA
Grupo de Investigación:
Microsistemas y Materiales Electrónicos
Email (Directorio UPM)
jimena.olivares
upm.es
Teléfono (Directorio UPM)
910672222
Datos de Memorias relacionados
Proyectos de I+D+i y generación de recursos
36 Proyectos de I+D+i
1: (2007)
Acción complementaria del proyecto Mixed SiP and SoC Integration of BAW Filters for Digital Wireless Transmission (MOBILIS)
2: (2007)
Detección eléctrica de resonancias mecánicas en microrresonadores basados en actuación piezoeléctrica con nitruro de aluminio
3: (2007)
Diseño y caracterización de MEMS piezoeléctricos para sensores y análisis químicos
4: (2007)
Mixed SiP and SoC Integration of BAW Filters for Digital Wireless Transmission
5: (2007)
Películas delgadas de materiales piezoeléctricos para aplicaciones en resonadores de ondas acústicas de volumen: nitruro de aluminio y nuevos óxidos complejos ferroeléctricos
6: (2007)
Tecnologías para la fabricación de microsistemas electromecánicos (MEMS) basados en el accionamiento piezoeléctrico con nitruro de aluminio (AlN): Optimización de los materiales y de su procesado
7: (2008)
Acción complemantaria para Mixed SiP and SoC integration of power BAW filters for digital wireless transmissions
8: (2008)
MATERIALES ELECTRÓNICOS EN PELÍCULA DELEGADA
9: (2008)
MOBILIS: Mixed SiP and SoC integration of power BAW filters for digital wireless transmissions
10: (2008)
Óxidos complejos piezoeléctricos para aplicaciones en microsistemas y filtros de alta frecuencia
11: (2008)
Películas delgadas de materiales piezoeléctricos para aplicaciones en resonadores de ondas acústicas de volumen: nitruro de aluminio y nuevos óxidos complejos ferroeléctricos¿
12: (2009)
MATERIALES ELECTRÓNICOS EN PELÍCULA DELEGADA
13: (2009)
MOBILIS - 027003
14: (2009)
PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
15: (2010)
MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
16: (2010)
MOBILIS - 027003
17: (2010)
PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
18: (2011)
INTEGRACIÓN DE RESONADORES BAW BASADOS EN ALN CON FRECUENCIAS SUSTANCIALMENTE DISTINTAS SOBRE EL MISMO SUSTRATO
19: (2011)
MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
20: (2011)
MOBILIS - 027003
21: (2012)
Materiales funcionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)
22: (2012)
Materiales funcionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)
23: (2012)
RaptaDiag: Rapid Aptamer based diagnostics for bacterial meningitis
24: (2013)
INTEGRATING DEVICES AND MATERIALS : A CHALLENGE FOR NEW INSTRUMENTATION IN ICT
25: (2013)
Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS) - MAREA
26: (2013)
Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS) - MAREA
27: (2013)
RAPID APTAMER BASED DIAGNOSTICS FOR BACTERIAL MENINGITIS RAPTADIAG
28: (2014)
MATERIALES AVANZADOS PARA BIOSENSORES BASADOS EN RESONADORES PIEZOELÉCTRICOS COMBINADOS CON NANOTUBOS DE CARBONO Y GRAFENO
29: (2014)
PLATAFORMA MULTIPLEXADA PARA EL DIAGNÓSTICO DE ENFERMEDADES CARDIOVASCULARES
30: (2015)
BIOPICA: Materiales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno
31: (2015)
PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
32: (2016)
RAPID APTAMER BASED DIAGNOSTICS FOR BACTERIAL MENINGITIS RAPTADIAG
33: (2018)
SEGALN: Sensores gravimétricos de gases basados en resonadores electroacústicos de película delgada de AlN para aplicaciones en temperaturas extremas
34: (2018)
THIN FILM BULK ACOSUTIC RESONATOR DEVELOPMENT
35: (2018)
THIN FILM BULK ACOSUTIC RESONATOR DEVELOPMENT
36: (2019)
THIN FILM BULK ACOSUTIC RESONATOR DEVELOPMENT
Formación de Investigadores y Movilidad
1 Tesis Doctorales
1: (2017)
Thin film electroacoustic resonators for physical and chemical sensing
Difusión de Resultados de Investigación
71 Artículos en revistas
1: (2007)
Aluminium nitride bulk acoustic wave devices with iridium bottom electrodes
2: (2007)
Assessment of aluminium nitride films sputtered on iridium electrodes
3: (2007)
Circuital model for the analysis of the characteristics of SAW devices of AlN film on non-insulating substrates
4: (2007)
Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy
5: (2007)
Frequency characterization of AlN piezoelectric resonators
6: (2007)
MEMS actuated piezoelectrically with AlN films
7: (2007)
Picosecond ultrasonics as a helpful technique for introducing a new electrode material en BAW technology: the iridium case
8: (2008)
Aluminum nitride for heatspreading in RF IC’s
9: (2008)
Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications
10: (2009)
AlN films sputtered on iridium electrodes for bulk acoustic wave resonators
11: (2010)
DCS Tx Filters Using AlN Resonators With Iridium Electrodes
12: (2010)
Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems
13: (2010)
Sputtered SiO2 as Low Acoustic Impedance Material for Bragg Mirror Fabrication in BAW Resonators
14: (2011)
AlN-based BAW resonators with CNT electrodes for gravimetric biosensing
15: (2012)
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
16: (2012)
High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors
17: (2012)
Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films
18: (2012)
Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
19: (2012)
On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
20: (2012)
On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
21: (2012)
Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
22: (2012)
Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators
23: (2013)
Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
24: (2013)
Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
25: (2014)
AlN Solidly Mounted Resonators for High Temperature Applications
26: (2014)
Carbon Nanotube Forests as Top Electrodes for A1N-Based Electroacoustic Resonators
27: (2014)
Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications
28: (2014)
Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications
29: (2014)
On the effectiveness of lateral excitation of shear modes in AlN layered resonators
30: (2014)
On the effectiveness of lateral excitation of shear modes in AlN layered resonators
31: (2014)
On the effectiveness of lateral excitation of shear modes in AlN layered resonators
32: (2014)
The influence of Acoustic Reflectors on the Temperature Coefficient of Frequency of Solidly Mounted Resonators
33: (2014)
ZnO/AlN Stacked BAW Resonators with Double Resonance
34: (2015)
Tungsten oxide layers of high acoustic impedance for fully insulating acoustic reflectors
35: (2015)
Assessment of the shear acoustic velocities in the different materials composing a high frequency solidly mounted resonator
36: (2015)
Carbon nanotube forests as top electrode in electroacoustic resonators
37: (2015)
Carbon nanotube forests as top electrode in electroacoustic resonators
38: (2015)
Carbon nanotube growth on piezoelectric AlN films: influence of catalyst underlayers
39: (2015)
Growth of carbon nanotube forests on metallic thin films
40: (2015)
Growth of carbon nanotube forests on metallic thin films
41: (2015)
Optimized tilted c-axis AlN films for improved operation of shear mode resonators
42: (2015)
Sputtered Al((1-x))Sc(x)A thin films with high areal uniformity for mass production
43: (2015)
Tungsten oxide layers of high acoustic impedance for fully insulating acoustic reflectors
44: (2016)
Bacteria detection with high-frequency gravimetric biosensors based on AlN thin film resonators
45: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
46: (2016)
Effects of biologically compatible buffers on the electrical response of gravimetric sensors operating at GHz frequencies
47: (2016)
Influence of induced stress on AlN-solidly mounted resonators
48: (2016)
Influence of liquid properties on the performance of S-0-mode Lamb wave sensors II: Experimental validation
49: (2016)
Influence of liquid properties on the performance of S0-mode Lamb wave sensors II: Experimental Validation
50: (2016)
Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
51: (2016)
Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
52: (2016)
Sheet resistance measurements of carbon nanotube forests for extended electrodes
53: (2016)
Transparent thin film bulk acoustic wave resonators
54: (2016)
Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors
55: (2017)
AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation
56: (2017)
Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
57: (2017)
Frequency response of AlN-based solidly mounted resonators under mechanical stress
58: (2017)
Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator
59: (2017)
Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
60: (2017)
Selection of aptamers to Neisseria meningitidis and Streptococcus pneumoniae surface specific proteins and affinity assay using thin film AIN resonators
61: (2017)
Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
62: (2018)
A1N-based solidly mounted resonators on glass substrates for high temperature applications
63: (2018)
Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers
64: (2018)
First steps towards simultaneous isolation and detection of exosomes with carbon nanotube-based SMRs
65: (2018)
Hafnium nitride as high acoustic impedance material for fully insulating acoustic reflectors
66: (2018)
Resonant and Antiresonant Frequencies Behavior with Temperature Changes in Gravimetric Sensors
67: (2019)
AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
68: (2019)
Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements
69: (2019)
Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors
70: (2019)
Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor
71: (2019)
MICROACOUSTIC SENSORS WITH INTEGRATED CARBON NANOTUBES FOR HIGH VOC SENSITIVITY
1 Conferencias invitadas en congresos
1: (2019)
UPM - NPU Workshop on Advanced Materials and Devices
5 Otras Publicaciones
1: (2017)
AlN-Solidly mounted resonators sustaining up to 1000°C with TCF compensation
2: (2017)
Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
3: (2017)
Integration and Bio-Functionalization of Vertically Aligned Carbon Nanotube Forests on High Frequency AlN Gravimetric Sensors
4: (2017)
Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
5: (2017)
Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
56 Ponencia en Congresos
1: (2007)
Aluminium nitride bulk acoustic wave devices with iridium bottom electrodes
2: (2007)
Assessment of aluminium nitride films sputtered on iridium electrodes
3: (2007)
Frequency Characterization of AlN Piezoelectric Resonators
4: (2007)
MEMS actuated piezoelectrically with AlN films
5: (2007)
Picosecond ultrasonics as a helpful technique for introducing a new electrode material en BAW technology: the iridium case
6: (2008)
Advanced determination of piezoelectric properties of AlN thin films on silicon substrates
7: (2008)
BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions
8: (2008)
Piezoelectric Microresonators Based on Aluminim Nitride for Mass Sensing Applications
9: (2009)
DCS Tx filters using AlN resonators with Iridium electrodes
10: (2009)
Influence of AlN quality on the Transverse and Longitudinal Coupling Coefficients of Acoustic devices
11: (2009)
Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications
12: (2009)
SiOx as low acoustic impedance material for Bragg mirror fabrication in BAW resonators
13: (2009)
Sputtered polycrystalline AlN as a platform for biofunctionalized devices
14: (2009)
Wide Bandwidth Bragg Mirrors for Multi-band Filter Chips
15: (2010)
Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors
16: (2010)
Optimization of thin AlN sputtered films for X-band BAW resonators
17: (2011)
Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors
18: (2011)
Growth of AlN oriented films on insulating substrates
19: (2011)
Multiple Frequency Solidly Mounted BAW Filters
20: (2011)
Solidly Mounted Resonators with Carbon Nanotube Electrodes for Biosensing Applications
21: (2011)
Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators
22: (2012)
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
23: (2012)
On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
24: (2012)
Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
25: (2012)
Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
26: (2013)
Acoustic Properties of Carbon Nanotube Electrodes in BAW Resonators
27: (2013)
Induced Surface Roughness to Promote the Growth of Tilted-AlN Films for Shear Mode Resonators
28: (2013)
IR-Reflectance Assessment of the Tilt Angle of AlN-Wurtzite Films for Shear Mode Resonators
29: (2013)
Piezoelectric and Electroacoustic Properties of V-Doped and Ta-Doped AlN Thin Films
30: (2014)
AlN shear mode solidly mounted resonator with temperature compensation for in-liquid sensing
31: (2014)
Assessment of the Acoustic Shear Velocity in SiO2 and Mo layers for Acoustic Reflectors
32: (2014)
Influence of the electrical extensions in AlN-BAW resonators for in-liquid biosensors
33: (2014)
Seed Layer Controlled Deposition of ZnO Films with a Tilted c-axis for Shear Mode Resonators
34: (2015)
Sputtered AlScN thin films with high areal uniformity for mass production
35: (2015)
Sputtered Al(1-x)ScxN thin films with high areal uniformity for mass production
36: (2015)
Tungsten oxide as high acoustic impedance material for fully insulating acoustic reflectors
37: (2016)
AlN based-Solidly mounted resonators at high temperatures: In-situ characterization
38: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
39: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
40: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
41: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
42: (2016)
Influence of induced stress on AlN-solidly mounted resonators
43: (2016)
Solidly mounted resonators with integrated carbon nanotube forests for chemical sensing
44: (2016)
Sputtered AlN thin films with tilted grains for shear mode resonators applied to biosensors
45: (2016)
Transparent thin film bulk acoustic wave resonators
46: (2016)
Transparent thin film bulk acoustic wave resonators
47: (2017)
AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation
48: (2017)
Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
49: (2017)
Integration and Bio-functionalization of vertically aligned carbon nanotube forests on high frequency AlN gravimetric sensors
50: (2017)
Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
51: (2017)
Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
52: (2018)
Finding the upper mass limit until which gravimetric sensors preserve their original TCF and sensitivity
53: (2018)
Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators
54: (2019)
AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
55: (2019)
Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements
56: (2019)
MICROACOUSTIC SENSORS WITH INTEGRATED CARBON NANOTUBES FOR HIGH VOC SENSITIVITY
Explotación de Resultados y Transferencia de Tecnología
2 Patentes
1: (2009)
Dispositivo de filtrado de ondas acústicas de volumen
2: (2010)
Dispositivo de filtrado de ondas acústicas de volumen
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S2i 2023 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)
