Observatorio de I+D+i UPM
• ESPAÑOL
• ENGLISH
INVESTIGADORES
ESTRUCTURAS DE I+D+I
ACTIVIDAD INVESTIGADORA
INNOVACIÓN
Investigador
Marta Clement Lorenzo
Categoría Investigador
CATEDRATICO UNIVERSIDAD
Cargos actuales
DIRECTOR DE CENTRO DE INVESTIGACIÓN.
Escuela UPM
E.T.S. DE INGENIEROS DE TELECOMUNICACION
Departamento:
INGENIERÍA ELECTRÓNICA
Centros/Institutos I+D+i
C. MATERIALES Y DISP. AVANZ. (CEMDATIC)
Area Conocimiento
TECNOLOGIA ELECTRONICA
Grupo de Investigación:
Microsistemas y Materiales Electrónicos
Email (Directorio UPM)
marta.clement
upm.es
Teléfono (Directorio UPM)
910672205
Datos de Memorias relacionados
Proyectos de I+D+i y generación de recursos
35 Proyectos de I+D+i
1: (2007)
Acción complementaria del proyecto Mixed SiP and SoC Integration of BAW Filters for Digital Wireless Transmission (MOBILIS)
2: (2007)
Detección eléctrica de resonancias mecánicas en microrresonadores basados en actuación piezoeléctrica con nitruro de aluminio
3: (2007)
Mixed SiP and SoC Integration of BAW Filters for Digital Wireless Transmission
4: (2007)
Películas delgadas de materiales piezoeléctricos para aplicaciones en resonadores de ondas acústicas de volumen: nitruro de aluminio y nuevos óxidos complejos ferroeléctricos
5: (2007)
Tecnologías para la fabricación de microsistemas electromecánicos (MEMS) basados en el accionamiento piezoeléctrico con nitruro de aluminio (AlN): Optimización de los materiales y de su procesado
6: (2008)
Acción complemantaria para Mixed SiP and SoC integration of power BAW filters for digital wireless transmissions
7: (2008)
MATERIALES ELECTRÓNICOS EN PELÍCULA DELEGADA
8: (2008)
MOBILIS: Mixed SiP and SoC integration of power BAW filters for digital wireless transmissions
9: (2008)
Óxidos complejos piezoeléctricos para aplicaciones en microsistemas y filtros de alta frecuencia
10: (2008)
Películas delgadas de materiales piezoeléctricos para aplicaciones en resonadores de ondas acústicas de volumen: nitruro de aluminio y nuevos óxidos complejos ferroeléctricos¿
11: (2009)
MATERIALES ELECTRÓNICOS EN PELÍCULA DELEGADA
12: (2009)
MOBILIS - 027003
13: (2009)
PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
14: (2010)
MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
15: (2010)
MOBILIS - 027003
16: (2010)
PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
17: (2011)
INTEGRACIÓN DE RESONADORES BAW BASADOS EN ALN CON FRECUENCIAS SUSTANCIALMENTE DISTINTAS SOBRE EL MISMO SUSTRATO
18: (2011)
MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
19: (2011)
MOBILIS - 027003
20: (2012)
Materiales funcionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)
21: (2012)
Materiales funcionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS)
22: (2012)
RaptaDiag: Rapid Aptamer based diagnostics for bacterial meningitis
23: (2013)
INTEGRATING DEVICES AND MATERIALS : A CHALLENGE FOR NEW INSTRUMENTATION IN ICT
24: (2013)
Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS) - MAREA
25: (2013)
Materiales multifuncionales en película delgada para dispositivos piezoeléctricos avanzados (resonadores acústicos y sensores MEMS) - MAREA
26: (2013)
RAPID APTAMER BASED DIAGNOSTICS FOR BACTERIAL MENINGITIS RAPTADIAG
27: (2014)
MATERIALES AVANZADOS PARA BIOSENSORES BASADOS EN RESONADORES PIEZOELÉCTRICOS COMBINADOS CON NANOTUBOS DE CARBONO Y GRAFENO
28: (2014)
PLATAFORMA MULTIPLEXADA PARA EL DIAGNÓSTICO DE ENFERMEDADES CARDIOVASCULARES
29: (2015)
BIOPICA: Materiales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno
30: (2015)
PELICULAS DELGADAS DE MATERIALES PIEZOELECTRICOS PARA APLICACIONES EN RESONADORES DE ONDAS ACUSTICAS DE VOLUMEN: NITRURO DE ALUMINIO Y NUEVOS OXIDOS COMPLEJOS FE
31: (2016)
MATERIALES MULTIFUNCIONALES EN PELICULA DELGADA PARA DISPOSITIVOS PIEZOELECTRICOS AVANZADOS( RESONADORES ACUSTICOS Y SENSORES MEMS)
32: (2016)
RAPID APTAMER BASED DIAGNOSTICS FOR BACTERIAL MENINGITIS RAPTADIAG
33: (2017)
CHARACTERIZATION OF SPUTTERED THIN FILMS OF AISCN
34: (2018)
SEGALN: Sensores gravimétricos de gases basados en resonadores electroacústicos de película delgada de AlN para aplicaciones en temperaturas extremas
35: (2019)
CHARACTERIZATION OF AISCN SPUTTERED THIN FILMS
Formación de Investigadores y Movilidad
1 Tesis Doctorales
1: (2016)
HIGH SENSITIVITY BIOSENSORS BASED ON SHEAR MODE AlN RESONATORS FOR IN LIQUID OPERATION
Difusión de Resultados de Investigación
68 Artículos en revistas
1: (2007)
Aluminium nitride bulk acoustic wave devices with iridium bottom electrodes
2: (2007)
Assessment of aluminium nitride films sputtered on iridium electrodes
3: (2007)
Circuital model for the analysis of the characteristics of SAW devices of AlN film on non-insulating substrates
4: (2007)
Combined assessment of piezoelectric AlN films using X-ray diffraction, infrared absorption and atomic force microscopy
5: (2007)
Frequency characterization of AlN piezoelectric resonators
6: (2007)
MEMS actuated piezoelectrically with AlN films
7: (2007)
Picosecond ultrasonics as a helpful technique for introducing a new electrode material en BAW technology: the iridium case
8: (2008)
Aluminum nitride for heatspreading in RF IC’s
9: (2008)
Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications
10: (2009)
AlN films sputtered on iridium electrodes for bulk acoustic wave resonators
11: (2010)
DCS Tx Filters Using AlN Resonators With Iridium Electrodes
12: (2010)
Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems
13: (2010)
Sputtered SiO2 as Low Acoustic Impedance Material for Bragg Mirror Fabrication in BAW Resonators
14: (2011)
AlN-based BAW resonators with CNT electrodes for gravimetric biosensing
15: (2011)
Anisotropic magnetotransport in SrTiO3 surface electron gases generated by Ar+ irradiation
16: (2012)
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
17: (2012)
High-Acoustic-Impedance Tantalum Oxide Layers for Insulating Acoustic Reflectors
18: (2012)
Influence of Crystal Quality on the Excitation and Propagation of Surface and Bulk Acoustic Waves in Polycrystalline AlN Films
19: (2012)
Low-thickness high-quality aluminum nitride films for super high frequency solidly mounted resonators
20: (2012)
On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
21: (2012)
On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
22: (2012)
Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
23: (2012)
Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators
24: (2012)
Thermally assisted tunneling transport in La0.7Ca0.3MnO3/SrTiO3:Nb Schottky-like heterojunctions
25: (2013)
Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
26: (2013)
Direct comparison of the gravimetric responsivities of ZnO-based FBARs and SMRs
27: (2014)
AlN Solidly Mounted Resonators for High Temperature Applications
28: (2014)
Carbon Nanotube Forests as Top Electrodes for A1N-Based Electroacoustic Resonators
29: (2014)
Discrete microfluidics based on aluminum nitride surface acoustic wave devices
30: (2014)
On the effectiveness of lateral excitation of shear modes in AlN layered resonators
31: (2014)
On the effectiveness of lateral excitation of shear modes in AlN layered resonators
32: (2014)
On the effectiveness of lateral excitation of shear modes in AlN layered resonators
33: (2014)
Resistive switching in manganite/graphene hybrid planar nanostructures
34: (2014)
The influence of Acoustic Reflectors on the Temperature Coefficient of Frequency of Solidly Mounted Resonators
35: (2014)
ZnO/AlN Stacked BAW Resonators with Double Resonance
36: (2015)
Tungsten oxide layers of high acoustic impedance for fully insulating acoustic reflectors
37: (2015)
Assessment of the shear acoustic velocities in the different materials composing a high frequency solidly mounted resonator
38: (2015)
Carbon nanotube growth on piezoelectric AlN films: influence of catalyst underlayers
39: (2015)
Discrete microfluidics based on aluminum nitride surface acoustic wave devices
40: (2015)
Growth of carbon nanotube forests on metallic thin films
41: (2015)
Growth of carbon nanotube forests on metallic thin films
42: (2015)
Optimized tilted c-axis AlN films for improved operation of shear mode resonators
43: (2015)
Sputtered Al((1-x))Sc(x)A thin films with high areal uniformity for mass production
44: (2015)
Tungsten oxide layers of high acoustic impedance for fully insulating acoustic reflectors
45: (2016)
Bacteria detection with high-frequency gravimetric biosensors based on AlN thin film resonators
46: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
47: (2016)
Effects of biologically compatible buffers on the electrical response of gravimetric sensors operating at GHz frequencies
48: (2016)
Influence of induced stress on AlN-solidly mounted resonators
49: (2016)
Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
50: (2016)
Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators
51: (2016)
Sheet resistance measurements of carbon nanotube forests for extended electrodes
52: (2016)
Transparent thin film bulk acoustic wave resonators
53: (2016)
Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors
54: (2017)
AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation
55: (2017)
Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
56: (2017)
Frequency response of AlN-based solidly mounted resonators under mechanical stress
57: (2017)
Gravimetric biosensor based on a 1.3 GHz AlN shear-mode solidly mounted resonator
58: (2017)
Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
59: (2017)
Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
60: (2018)
A1N-based solidly mounted resonators on glass substrates for high temperature applications
61: (2018)
Effects of Post-Deposition Vacuum Annealing on the Piezoelectric Properties of AlScN Thin Films Sputtered on 200 Mm Production Wafers
62: (2018)
Hafnium nitride as high acoustic impedance material for fully insulating acoustic reflectors
63: (2018)
Resonant and Antiresonant Frequencies Behavior with Temperature Changes in Gravimetric Sensors
64: (2019)
AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
65: (2019)
Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements
66: (2019)
Direct growth of few-layer graphene on AlN-based resonators for high-sensitivity gravimetric biosensors
67: (2019)
Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor
68: (2019)
MICROACOUSTIC SENSORS WITH INTEGRATED CARBON NANOTUBES FOR HIGH VOC SENSITIVITY
2 Conferencias invitadas en congresos
1: (2019)
From Smart Materials to Sensors Workshop, Nancy April 4 2019
2: (2019)
UPM - NPU Workshop on Advanced Materials and Devices
5 Otras Publicaciones
1: (2017)
AlN-Solidly mounted resonators sustaining up to 1000°C with TCF compensation
2: (2017)
Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
3: (2017)
Integration and Bio-Functionalization of Vertically Aligned Carbon Nanotube Forests on High Frequency AlN Gravimetric Sensors
4: (2017)
Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
5: (2017)
Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
59 Ponencia en Congresos
1: (2007)
Aluminium nitride bulk acoustic wave devices with iridium bottom electrodes
2: (2007)
Assessment of aluminium nitride films sputtered on iridium electrodes
3: (2007)
Frequency Characterization of AlN Piezoelectric Resonators
4: (2007)
MEMS actuated piezoelectrically with AlN films
5: (2007)
Picosecond ultrasonics as a helpful technique for introducing a new electrode material en BAW technology: the iridium case
6: (2008)
Advanced determination of piezoelectric properties of AlN thin films on silicon substrates
7: (2008)
Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes
8: (2008)
BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions
9: (2008)
Piezoelectric Microresonators Based on Aluminim Nitride for Mass Sensing Applications
10: (2009)
DCS Tx filters using AlN resonators with Iridium electrodes
11: (2009)
Influence of AlN quality on the Transverse and Longitudinal Coupling Coefficients of Acoustic devices
12: (2009)
Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications
13: (2009)
SiOx as low acoustic impedance material for Bragg mirror fabrication in BAW resonators
14: (2009)
Sputtered polycrystalline AlN as a platform for biofunctionalized devices
15: (2009)
Wide Bandwidth Bragg Mirrors for Multi-band Filter Chips
16: (2010)
Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors
17: (2010)
Optimization of thin AlN sputtered films for X-band BAW resonators
18: (2011)
Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors
19: (2011)
Growth of AlN oriented films on insulating substrates
20: (2011)
Multiple Frequency Solidly Mounted BAW Filters
21: (2011)
Solidly Mounted Resonators with Carbon Nanotube Electrodes for Biosensing Applications
22: (2011)
Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators
23: (2012)
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
24: (2012)
On the Lateral Excitation Of Shear Modes in AlN Layered Resonators
25: (2012)
On the origin of RTS noise in nanoFETs
26: (2012)
Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
27: (2012)
Piezoelectric and electroacoustic properties of Ti-doped AlN thin films as a function of Ti content
28: (2013)
Acoustic Properties of Carbon Nanotube Electrodes in BAW Resonators
29: (2013)
Induced Surface Roughness to Promote the Growth of Tilted-AlN Films for Shear Mode Resonators
30: (2013)
IR-Reflectance Assessment of the Tilt Angle of AlN-Wurtzite Films for Shear Mode Resonators
31: (2013)
Piezoelectric and Electroacoustic Properties of V-Doped and Ta-Doped AlN Thin Films
32: (2014)
AlN shear mode solidly mounted resonator with temperature compensation for in-liquid sensing
33: (2014)
Assessment of the Acoustic Shear Velocity in SiO2 and Mo layers for Acoustic Reflectors
34: (2014)
Influence of the electrical extensions in AlN-BAW resonators for in-liquid biosensors
35: (2014)
Seed Layer Controlled Deposition of ZnO Films with a Tilted c-axis for Shear Mode Resonators
36: (2015)
Sputtered AlScN thin films with high areal uniformity for mass production
37: (2015)
Sputtered Al(1-x)ScxN thin films with high areal uniformity for mass production
38: (2015)
Tungsten oxide as high acoustic impedance material for fully insulating acoustic reflectors
39: (2016)
AlN based-Solidly mounted resonators at high temperatures: In-situ characterization
40: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
41: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
42: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
43: (2016)
Direct comparison of the sensitivity of QCMs and AlN-based TFRs biosensors
44: (2016)
Influence of induced stress on AlN-solidly mounted resonators
45: (2016)
Solidly mounted resonators with integrated carbon nanotube forests for chemical sensing
46: (2016)
Sputtered AlN thin films with tilted grains for shear mode resonators applied to biosensors
47: (2016)
Transparent thin film bulk acoustic wave resonators
48: (2016)
Transparent thin film bulk acoustic wave resonators
49: (2017)
AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation
50: (2017)
Direct integration of CNT forests on solidly mounted resonators and their influence on device performance
51: (2017)
Integration and Bio-functionalization of vertically aligned carbon nanotube forests on high frequency AlN gravimetric sensors
52: (2017)
Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
53: (2017)
Substrate texturing for homogeneous deposition of tilted c-axis AlN films for shear mode operation
54: (2018)
Finding the upper mass limit until which gravimetric sensors preserve their original TCF and sensitivity
55: (2018)
Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators
56: (2018)
Reactive sputtering of AlScN thin Ulms with variable Sc content on 200 mm wafers
57: (2019)
AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
58: (2019)
Combined assessment of Al1-xScxN thin films by RBS, XRD, FTIR and BAW frequency response measurements
59: (2019)
MICROACOUSTIC SENSORS WITH INTEGRATED CARBON NANOTUBES FOR HIGH VOC SENSITIVITY
Explotación de Resultados y Transferencia de Tecnología
2 Patentes
1: (2009)
Dispositivo de filtrado de ondas acústicas de volumen
2: (2010)
Dispositivo de filtrado de ondas acústicas de volumen
• TOMA DE DATOS DE MEMORIAS Y CV
• UPM.ES
S2i 2023 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)
