{"id":10289,"date":"2022-07-27T12:31:00","date_gmt":"2022-07-27T10:31:00","guid":{"rendered":"https:\/\/www.upm.es\/recursosidi\/offers-resources\/sin categor\u00eda\/uv-mask-aligner-photolithography\/"},"modified":"2022-07-27T12:31:06","modified_gmt":"2022-07-27T10:31:06","slug":"uv-mask-aligner-photolithography","status":"publish","type":"product","link":"https:\/\/www.upm.es\/recursosidi\/en\/offers-resources\/technological-scientific-services\/services-technological-scientific-services\/uv-mask-aligner-photolithography\/","title":{"rendered":"UV Mask Aligner Photolithography"},"content":{"rendered":"

Scientific and technology services<\/h2>\n

UV Mask Aligner Photolithography
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KEY WORDS: micro-manufacture, nano-manufacture, lithography, photolithography.<\/p>\n

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Description of the services offered
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The photolithography machine available makes micro-structures at wafer level using mask projection. The equipment in question has a mask aligner that allows multi-structure compound structures to be made. Apart from the machine, hot plates are available to treat the photoresist, as is a laminar flow hood, which prevents contamination and dirt between the wafers.
The service provided can be adapted to the needs of whoever requests it, with the service being divided into different processes:
\u00bf Photolithography and developing
\u00bf Photoresist deposit, photolithography and developing
\u00bf Photoresist deposit, thickness profiling, photolithography and developing
Renting a lithography mask or designing and making one ad hoc are also offered.
\n \n <\/p>\n

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Needs requested and applications<\/h4>\n

Integration and miniaturisation are the order of the day. Using photolithography multiple structures with several layers can be integrated into a single circuit.<\/p>\n

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Sector or area of application<\/h4>\n

Micro and nano manufacture<\/p>\n

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Differential skills<\/h4>\n

The production equipment enables innovation with many materials and geometries. The microscope it includes enables highly precise positioning on previously produced structures. Furthermore, by complementing the equipment with the other optical profiling instruments, manufacture can be supervised at all times.<\/p>\n

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Equipment description<\/h4>\n

Mask aligner photolithographic machine MA-6 made by S\u00dcSS MicroTec GmbH. Exposure to ultraviolet light is carried out using a mercury vapour lamp which has the following main emission peaks: 435.8 nm (g-line), 404.7 nm (h-line) and 365.4 nm (i-line). Lithography can be done on 6\u00bf wafers as well as for smaller sized substrates.
There is also a stock of lithographic masks that can be rented:
\u00bf 200 um (6′) mask for 65 cell Chips.
\u00bf 100 um (6′) mask for 65 cell Chips.
\u00bf 200 um (4′) mask for 16 cell Chips.
\u00bf 100 um (4′) mask for 3 cell Chips. Positive and negative mask.
\u00bf 200 um (4′) mask for 3 cell Chips. Positive and negative mask.
\u00bf 800 um (4′) mask for 3 cell Chips.
\u00bf Various masks with different templates, for reference or research matters.<\/p>\n

\n \n <\/p>\n

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Request for service<\/h4>\n

Contact by e-mail, putting \u00bfPROVISION OF SERVICE\u00bf in the subject, and the service in question with an approximate description of what is required and the time line in the body of the e-mail.
Contact e-mails: <\/span><\/span> or <\/span><\/span><\/p>\n

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Descargar ficha<\/span><\/a><\/div>","protected":false},"excerpt":{"rendered":"

Nano and micro-manufacture using the photolithographic mask alignment technique for photoresists that are sensitive to ultraviolet.<\/p>\n","protected":false},"featured_media":10284,"template":"","meta":{"_acf_changed":false},"product_cat":[2403],"product_tag":[7642,7492,7494,7644],"comunidades-upm":[],"quien":[],"mapa":[{"term_id":76,"name":"Bioeconomy, Biotechnology and Food Systems","slug":"bioeconomy-biotechnology-food_systems","term_group":0,"term_taxonomy_id":76,"taxonomy":"mapa","description":"","parent":0,"count":24,"filter":"raw","term_order":"5"},{"term_id":75,"name":"Industry, Materials and Circular Economy","slug":"industry-materials-circular_economy","term_group":0,"term_taxonomy_id":75,"taxonomy":"mapa","description":"","parent":0,"count":87,"filter":"raw","term_order":"14"},{"term_id":2407,"name":"Science For Engineering and 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