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Descripción
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| Future generations of MEMS require new advanced materials with significantly improved mechanical and chemical properties. Nanodiamond (ND) and AlN thin films have recently attracted much attention due to their applicability in rf and bio-medical transducer applications. AlN/ND- based microstuctures show a very good coupling efficiency, offering an essential advantage over conventional solutions combining the advanced mechanical properties, simplicity of microfabrication, chemical inertness, long life and the ability to operate in harsh environments. This allows for the realization of unique micromechanical devices, e.g. ultrasensitive robust sensors, adjustable rf components as well as strain-engineered optical MEMS. The development AlN/ND heterostructures for adjustable microlenses, rf switches and implantable piezo-generators is addressed in this talk with particular focus on high frequency applications. | |
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Internacional
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No |
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Nombre congreso
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Seminarios del ISOM |
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Entidad organizadora
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ISOM-DIE-ETSIT-UPM |
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Nacionalidad Entidad
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Sin nacionalidad |
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Lugar/Ciudad de impartición
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ISOM-DIE-ETSIT-UPM |
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Fecha inicio
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05/12/2012 |
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Fecha fin
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05/12/2012 |