Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Experimental comparison of FBARs and SMRs responsitivities to mass loadings
Year:2012
Research Areas
  • Electronic technology and of the communications
Information
Abstract
The utilisation of thin film technology to develop film bulk acoustic resonators (FBARs) and solidly mounted resonators (SMRs), offers great potential to outperform the sensitivity and minimum detection limit of gravimetric sensors. Up to now, the choice between FBARs and SMRs depends primarily on the users? ability to design and fabricate Bragg reflectors and/or membranes, because neither of these two types of resonators has been demonstrated to be superior to the other. In the work reported here, it is shown that identically designed FBARs and SMRs resonating at the same frequency exhibit different responsitivities, Rm, to mass loadings, being the FBARs more responsive than the SMRs. For the specific device design and resonant frequency (~2 GHz) of the resonators presented, FBARs? mass responsitivity is ~20% greater than that of SMRs, and although this value should not be taken as universal for all possible device designs, it clearly indicates that FBAR devices should be favoured over SMRs in gravimetric sensing applications.
International
Si
Congress
International Ultrasonics Symposium
960
Place
Dresde, Alemania
Reviewers
Si
ISBN/ISSN
978-1-4673-4562-0
Start Date
07/10/2012
End Date
10/10/2012
From page
1545
To page
1548
2012 IEEE International Ultrasonics Symposium Proceedings
Participants
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: José Capilla Osorio (UPM)
  • Autor: Jorge Pedros Ayala (UPM)
  • Autor: Luis García-Gancedo (University of Cambridge)
  • Autor: J. K. Luo (University of Bolton)
  • Autor: W. I. Milne (Kyung Hee University)
  • Autor: A. J. Flewitt (University of Cambridge)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Instituto Universitario de Sistemas Optoelectrónicos y Microtecnología
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Tecnología Electrónica
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