Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Assessment of the Acoustic Shear Velocity in SiO2 and Mo layers for Acoustic Reflectors
Year:2014
Research Areas
  • Electronic technology and of the communications
Information
Abstract
We present a method to assess the shear acoustic velocity in SiO2 and Mo sputtered films, which are materials commonly used as low and high acoustic impedance layers in the acoustic reflectors of solidly mounted resonators. The method consists in the analysis of the frequency response of AlN-based resonators operating in the shear mode using acoustic mirrors specifically designed to obtain a half-wavelength resonance in the layer under study, the thickness of which is thickened to achieve a significant signal. After measuring the thickness and mass densities of all the layers composing the resonator, the fitting by Mason?s model of the electrical response in a wide frequency range provides accurate values of both the longitudinal and the shear mode velocities. The shear acoustic velocities of porous SiO2 and Mo are 3150 m/s and 3450 m/s respectively. This method allows assessing the shear mode acoustic velocity of any material by adequately designing the test structure.
International
Si
Congress
European frequency and time forum 2014
960
Place
Neuchatel (Suiza)
Reviewers
Si
ISBN/ISSN
978-1-4799-5252-6
Start Date
23/06/2014
End Date
26/06/2014
From page
36
To page
39
Proceedings of the European frequency and time forum 2014
Participants
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: Teona Mirea (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Enrique Iborra Grau (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)