Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Discrete microfluidics based on aluminum nitride surface acoustic wave devices
Year:2014
Research Areas
  • Electronic technology and of the communications
Information
Abstract
To date, most surface acoustic wave (SAW) devices have been made from bulk piezoelectric materials, such as quartz, lithium niobate or lithium tantalite. These bulk materials are brittle, less easily integrated with electronics for control and signal processing, and difficult to realize multiple wave modes or apply complex electrode designs. Using thin film SAWs makes it convenient to integrate microelectronics and multiple sensing or microfluidics techniques into a lab-on-a-chip with low cost and multi-functions on various substrates (silicon, glass or polymer). In the work, aluminum nitride (AlN)-based SAW devices were fabricated and characterized for discrete microfluidic (or droplet based) applications. AlN films with a highly c-axis texture were deposited on silicon substrates using a magnetron sputtering system. The fabricated AlN/ Si SAW devices had a Rayleigh wave mode at a frequency of 80.3 MHz (with an electromechanical coupling coefficient k2 of 0.24 % and phase velocity vp of 5,139 m/s) and a higher-frequency-guided wave mode at 157.3 MHz (with a k2 value of 0.22 % and vp of 10,067 m/s). Both modes present a large out of band rejection of *15 dB and were successfully applied for microfluidic manipulation of liquid droplets, including internal streaming, pumping and jetting/ nebulization, and their performance differences for microfluidic functions were discussed. A detailed investigation of the influences of droplet size (ranging from 3 to 15 lL) and RF input power (0.25?68 W) on microdroplet behavior has been conducted. Results showed that pumping and jetting velocities were increased with an increase of RF power or a decrease in droplet size.
International
Si
JCR
Si
Title
Microfluid Nanofluid
ISBN
1613-4982
Impact factor JCR
2,665
Impact info
Volume
DOI 10.1007/s10404-014-1456-1
Journal number
From page
1
To page
12
Month
SIN MES
Ranking
Participants
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: J. Zhou (Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, China)
  • Autor: H. F. Pang (Thin Film Centre, Scottish Universities Physics Alliance (SUPA), University of the West of Scotland, Paisley, UK)
  • Autor: L. Garcia-Gancedo (Electrical Engineering Division, Department of Engineering, University of Cambridge, Cambridge, UK)
  • Autor: H. Jin (Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, China)
  • Autor: J. K. Luo (Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, China)
  • Autor: S. Smith (Institute for Bioengineering, School of Engineering, The University of Edinburgh, Edinburgh, UK)
  • Autor: S. R. Dong (Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, China)
  • Autor: D. M. Wang (Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, China)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Ingeniería Electrónica
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)