Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Tungsten oxide layers of high acoustic impedance for fully insulating acoustic reflectors
Year:2015
Research Areas
  • Electronic technology and of the communications
Information
Abstract
Gravimetric sensors based on solidly mounted resonators require fully insulating acoustic reflectors to avoid parasitics when operating in liquid media. In this work we propose a new high acoustic impedance material, tungsten oxide (WO3), for acoustic reflectors. We have optimized the sputtering conditions of WO3 to obtain nonconductive layers with mass density around 6700 kg/m3 and acoustic velocities for the shear and the longitudinal modes up to 2700 m/s and 4500 m/s, respectively. Compared to other conventionally used high impedance layers, WO3 films display several manufacture advantages, such as high deposition rates, great reproducibility and good adhesion to underlying substrates. We have demonstrated the applicability of WO3 in practical shear mode bulk acoustic wave resonators that display good performance in liquid environments.
International
Si
JCR
Si
Title
Ieee Transactions on Ultrasonics Ferroelectrics And Frequency Control
ISBN
0885-3010
Impact factor JCR
1,503
Impact info
Volume
10.1109/TUFFC.2015.2498968
Journal number
From page
1
To page
7
Month
SIN MES
Ranking
Participants
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: Barbara Diaz Duran (UPM)
  • Autor: Junaid Munir (University Technology Malaysia)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Teona Mirea (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Enrique Iborra Grau (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)