Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Influence of induced stress on AlN-solidly mounted resonators
Year:2016
Research Areas
  • Electronic technology and of the communications
Information
Abstract
Abstract: The frequency variation of solidly mounted resonators made with AlN thin films operating in longitudinal and shear acoustic modes with induced in plane mechanical strain is presented. The induced deformation range is in the hundreds of microstrains and the frequency variations in the hundreds of kHz, giving coefficients of resonant frequency with deformation in the order of 56% per unit strain. The influence on this parameter of the resonant mode, coupling factor and frequency is analyzed.
International
Si
Congress
European Frequency and Time Forum (EFTF), 2016
970
Place
York (UK)
Reviewers
Si
ISBN/ISSN
978-1-5090-0720-2
Start Date
04/04/2016
End Date
07/04/2016
From page
1
To page
4
Proceedings in European Frequency and Time Forum (EFTF), 2016
Participants
  • Autor: Álvaro Delicado (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Teona Mirea (UPM)
  • Autor: Barbara Diaz Duran (UPM)
  • Autor: Enrique Iborra Grau (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica
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