Memorias de investigación
Artículos en revistas:
Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation
Año:2016
Áreas de investigación
  • Células solares
Datos
Descripción
The phosphosilicate glass (PSG), fabricated by tube furnace diffusion using a POCl3 source, is widely used as a dopant source in the manufacturing of crystalline silicon solar cells. Although it has been a widely addressed research topic for a long time, there is still lack of a comprehensive understanding of aspects such as the growth, the chemical composition, possible phosphorus depletion, the resulting in-diffused phosphorus profiles, the gettering behavior in silicon, and finally the metal-contact formation. This paper addresses these different aspects simultaneously to further optimize process conditions for photovoltaic applications. To do so, a wide range of experimental data is used and combined with device and process simulations, leading to a more comprehensive interpretation. The results show that slight changes in the PSG process conditions can produce high-quality emitters. It is predicted that PSG processes at 860?°C for 60?min in combination with an etch-back and laser doping from PSG layer results in high-quality emitters with a peak dopant density Npeak?=?8.0?×?1018?cm?3 and a junction depth dj?=?0.4?m, resulting in a sheet resistivity?sh?=?380 ?/sq and a saturation current-density J0 below 10 fA/cm2. With these properties, the POCl3 process can compete with ion implantation or doped oxide approaches.
Internacional
Si
JCR del ISI
Si
Título de la revista
Journal of Applied Physics
ISSN
0021-8979
Factor de impacto JCR
2,185
Información de impacto
Volumen
119
DOI
Número de revista
Desde la página
185704-1
Hasta la página
185704-9
Mes
SIN MES
Ranking
Esta actividad pertenece a memorias de investigación
Participantes
  • Autor: H. Wagner
  • Autor: A. Dastgheib-Shirazi
  • Autor: B. Min
  • Autor: A.E. Morishige
  • Autor: M. Steyer
  • Autor: G. Hahn
  • Autor: Carlos del Cañizo Nadal UPM
  • Autor: T. Buonassisi
  • Autor: P.P. Altermatt
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar