Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Thermal shields for heat loss reduction in Siemens-type CVD reactors
Year:2016
Research Areas
  • Solar cells
Information
Abstract
The use of thermal shields to reduce radiation heat loss in Siemens-type CVD reactors is analyzed, both theoretically and experimentally. The potential savings from the use of the thermal shields is first explored using a radiation heat model that takes emissivity variations with wavelength into account, which is important for materials that do not behave as gray bodies. The theoretical calculations confirm that materials with lower surface emissivity lead to higher radiation savings. Assuming that radiation heat loss is responsible for around 50% of the total power consumption, a reduction of 32.9% and 15.5% is obtained if thermal shields with constant emissivities of 0.3 and 0.7 are considered, respectively. Experiments considering different thermal shields are conducted in a laboratory CVD reactor, confirming that the real materials do not behave as gray bodies, and proving that significant energy savings in the polysilicon deposition process are obtained. Using silicon as a thermal shield leads to energy savings of between 26.5?28.5%. For wavelength-dependent emissivities, the model shows that there are significant differences in radiation heat loss, of around 25%, when compared to that of constant emissivity. The results of the model highlight the importance of having reliable data on the emissivities within the relevant range of wavelengths, and at deposition temperatures, which remains a pending issue.
International
Si
JCR
Si
Title
Ecs Journal of Solid State Science And Technology
ISBN
2162-8769
Impact factor JCR
0,917
Impact info
Volume
5
10.1149/2.0171603jss
Journal number
3
From page
1
To page
7
Month
SIN MES
Ranking
Participants
  • Autor: Alba Ramos Cabal
  • Autor: Javier Valdehita Torija (UPM)
  • Autor: Juan Carlos Zamorano Saavedra (UPM)
  • Autor: Carlos del Cañizo Nadal (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)