Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Circuital model for the analysis of the characteristics of SAW devices of AlN film on non-insulating substrates
Year:2007
Research Areas
  • Electronics engineering
Information
Abstract
In this paper we describe a method to assess the piezoelectric response of a piezoelectric thin film deposited on a conductive substrate. It is based on analyzing the frequency response of a surface acoustic wave (SAW) filter made on the piezoelectric thin film. For this analysis, we use a circuital model that takes into account the theoretical response of the ideal filter along with all the external and internal parasitic effects that deteriorate the response. Using this model, we can obtain the electromechanical coupling factor of the piezoelectric material (kk2m) with good accuracy. If parasitic effects are not considered, kk2 m can be underestimated by a factor of up to 20. We have tested our model using SAW filters made on AlN thin films sputtered on substrates with different conductivities. A discussion on the relation between the different circuital elements and the physical properties of the filters also is provided.
International
Si
JCR
Si
Title
IEEE T ULTRASON FERR
ISBN
0885-3010
Impact factor JCR
1,654
Impact info
Volume
54
Journal number
0
From page
2367
To page
2375
Month
SIN MES
Ranking
Participants
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Alfredo Sanz Hervas (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Lucía Vergara Herrero (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y materiales electrónicos
  • Departamento: Tecnología Electrónica
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