Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography
Year:2016
Research Areas
  • Sensors,
  • Biosensors,
  • Optician,
  • Engineering
Information
Abstract
In this work we present the refractive index sensing performance comparison between resonant (R-NPs) and silicon dioxide (SiO2-NPs) high-aspect ratio nano-pillars arrays. Both arrays have been fabricated by laser interference lithography and reactive ion etching. The R-NPs are made by a multilayer of silicon oxide and silicon nitride distributed to act as a vertical resonant cavity with two Bragg reflectors.response for the different refractive indexes ranging from 1.330 to 1.342. A linear fit of the resonant modes shift is observed as function of the bulk refractive index of the liquid infiltrated. For the type of transducer analyzed, a relevant sensitivity of 10017 cm-1/Refractive Index Unit (RIU) is achieved allowing reaching a competitive Limit of Detections (LoD) in the order of 1x10-5 RIU.
International
Si
JCR
Si
Title
Optical Materials Express
ISBN
2159-3930
Impact factor JCR
2,657
Impact info
Datos JCR del año 2015
Volume
6
10.1364/OME.6.002264
Journal number
7
From page
2264
To page
2272
Month
DICIEMBRE
Ranking
Participants
  • Autor: Iñaki Cornago (Cemitec)
  • Autor: Ana Lopez Hernandez (UPM)
  • Autor: Rafael Casquel Del Campo (UPM)
  • Autor: Miguel Holgado Bolaños (UPM)
  • Autor: Maria Fe Laguna Heras (UPM)
  • Autor: Francisco Javier Sanza Gutierrez (UPM)
  • Autor: Javier Bravo (Cemitec)
Research Group, Departaments and Institutes related
  • Creador: Departamento: Física Aplicada e Ingeniería de Materiales
S2i 2020 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)