Observatorio de I+D+i UPM

Memorias de investigación
Communications at congresses:
Increase on siemens reactor throughput by tailoring temperature profile of polysilicon rods
Year:2007
Research Areas
  • Electronic circuits,
  • Electronic devices
Information
Abstract
Siemens process productivity can be limited by non homogeneous temperature profile in polysilicon rods. To overcome this limitation high frequency current sources have been proposed. An analysis is presented which, based on electromagnetic and heat transfer theory, studies temperature and current density profiles within the rods. Two linked differential equations have been numerically solved by use of non-linear methods. The solution of these equations shows that by means of an increase in current frequency, skin effect takes place, heat generation in the inner part of the rod is decreased and therefore temperature homogeneity increases. The effect of high frequency current sources in the rod stability is also analyzed, and it can be derived that resonance problems could appear.
International
Si
Congress
6th SPANISH CONFERENCE ON ELECTRON DEVICES, PROCEEDINGS
960
Place
El escorial, Madrid
Reviewers
Si
ISBN/ISSN
978-1-4244-0868-9
Start Date
31/01/2007
End Date
02/02/2007
From page
To page
Participants
  • Autor: Carlos del Cañizo Nadal (UPM)
  • Autor: Ignacio Tobias Galicia (UPM)
  • Autor: Antonio Luque Lopez (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Silicio y nuevos conceptos para células solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar
  • Departamento: Electrónica Física
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