Memorias de investigación
Artículos en revistas:
Simulation and laser vibrometry characterization of piezoelectric AlN thin films
Año:2008
Áreas de investigación
  • Industria electrónica
Datos
Descripción
In this paper, the electric field induced deformations of sputter-deposited piezoelectric aluminum nitride thin films sandwiched between electrodes on top of a silicon substrate are studied by numerical calculations and scanning laser interferometric measurements. In our calculations based on the finite element method, the results show the displacement of the top and bottom surfaces of both the thin film and the substrate, for either a free or a perfectly clamped structure. The confirmation that the bottom surface of the film is deformed reveals the limitations of techniques that only access the top surface, as well as the double-beam interferometric configuration, under specific conditions. In addition, the simulations demonstrate the dependence of the displacements on the size of the upper electrode and the contribution of the transverse piezoelectric coefficient d31 to the features of the displacement profiles. A laser scanning vibrometry technique was used to measure deformations on the top surface with subpicometer vertical resolution. By comparing the calculated and the experimental displacement profiles, an advanced approach is discussed to obtain accurate quantitative information of both coefficients d31 and d33.
Internacional
Si
JCR del ISI
Si
Título de la revista
JOURNAL OF APPLIED PHYSICS
ISSN
0021-8979
Factor de impacto JCR
2,171
Información de impacto
Volumen
104
DOI
10.1063
Número de revista
53502
Desde la página
053502-1
Hasta la página
053502-9
Mes
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Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Tecnología Electrónica