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Memorias de investigación
Research Publications in journals:
Simulation and laser vibrometry characterization of piezoelectric AlN thin films
Year:2008
Research Areas
  • Electronics engineering
Information
Abstract
In this paper, the electric field induced deformations of sputter-deposited piezoelectric aluminum nitride thin films sandwiched between electrodes on top of a silicon substrate are studied by numerical calculations and scanning laser interferometric measurements. In our calculations based on the finite element method, the results show the displacement of the top and bottom surfaces of both the thin film and the substrate, for either a free or a perfectly clamped structure. The confirmation that the bottom surface of the film is deformed reveals the limitations of techniques that only access the top surface, as well as the double-beam interferometric configuration, under specific conditions. In addition, the simulations demonstrate the dependence of the displacements on the size of the upper electrode and the contribution of the transverse piezoelectric coefficient d31 to the features of the displacement profiles. A laser scanning vibrometry technique was used to measure deformations on the top surface with subpicometer vertical resolution. By comparing the calculated and the experimental displacement profiles, an advanced approach is discussed to obtain accurate quantitative information of both coefficients d31 and d33.
International
Si
JCR
Si
Title
JOURNAL OF APPLIED PHYSICS
ISBN
0021-8979
Impact factor JCR
2,171
Impact info
Volume
104
10.1063
Journal number
53502
From page
053502-1
To page
053502-9
Month
SEPTIEMBRE
Ranking
Participants
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Sheila González Castilla (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Tecnología Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)