Observatorio de I+D+i UPM

Memorias de investigación
Research Publications in journals:
Combined grazing incidence RBS and TEM analysis of luminescent nano-SiGe/SiO2 multilayers
Year:2008
Research Areas
  • Electronics engineering
Information
Abstract
Multilayer structures with five periods of amorphous SiGe nanoparticles/SiO2 layers with different thickness were deposited by Low Pressure Chemical Vapor Deposition and annealed to crystallize the SiGe nanoparticles. The use of grazing incidence RBS was necessary to obtain sufficient depth resolution to separate the signals arising from the individual layers only a few nm thick. The average size and areal density of the embedded SiGe nanoparticles as well as the oxide interlayer thickness were determined from the RBS spectra. Details of eventual composition changes and diffusion processes caused by the annealing processes were also studied. Transmission Electron Microscopy was used to obtain complementary information on the structural parameters of the samples in order to check the information yielded by RBS. The study revealed that annealing at 900 C for 60 s, enough to crystallize the SiGe nanoparticles, leaves the structure unaltered if the interlayer thickness is around 15 nm or higher.
International
Si
JCR
Si
Title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIO
ISBN
0168-583X
Impact factor JCR
0,997
Impact info
Volume
266
Journal number
0
From page
1397
To page
1401
Month
ENERO
Ranking
Participants
  • Participante: A Kling
  • Participante: J.C. Soares
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Tomas Rodriguez Rodriguez (UPM)
  • Participante: M.I. Ortiz
  • Autor: Andres Rodriguez Dominguez (UPM)
  • Participante: C Ballesteros
Research Group, Departaments and Institutes related
  • Creador: Departamento: Tecnología Electrónica
S2i 2020 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)