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Memorias de investigación
Communications at congresses:
Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors
Year:2010
Research Areas
  • Electronic technology and of the communications
Information
Abstract
We investigate the influence of the structure of acoustic reflectors on the quality factors of solidly mounted bulk acoustic wave resonators made of aluminum nitride. We compare the quality factors of resonators built on conventional ¿/4 Bragg reflectors with those of resonators fabricated on asymmetric acoustic reflectors composed of layers of thicknesses different from ¿/4. The two kinds of reflectors are made of porous silicon dioxide and iridium as low and high acoustic impedance materials, respectively. We assess the effective electromechanical coupling factor and the quality factor of various resonators tuned at different frequencies within the reflector band. The effective electromechanical coupling factor is roughly constant at around 6.3% for all the devices. For the symmetric reflectors the quality factor at the antiresonant frequency reaches a minimum at the centre of the band, whereas it remains roughly constant in the whole band for the asymmetric reflectors. This is attributed to the greater reflection of shear waves in the center of the band provided by the asymmetric reflectors.
International
Si
Congress
2010 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM
960
Place
San Diego, EE. UU.
Reviewers
Si
ISBN/ISSN
1051-0117
Start Date
11/10/2010
End Date
14/10/2010
From page
1
To page
4
2010 IEEE International Ultrasonics Symposium Proceedings
Participants
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Enrique Wegmann . (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: José Capilla Osorio (UPM)
  • Autor: Enrique Iborra Grau (UPM)
  • Autor: Jesus Sangrador Garcia (UPM)
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Tecnología Electrónica
S2i 2019 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
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