Memorias de investigación
Research Publications in journals:
Advanced 3D micromachining techniques using UV laser sources.
Year:2007

Research Areas
  • Electronic circuits,
  • Electronic devices

Information
Abstract
Laser systems have been widely applied in the last 20 years in semiconductor industry in microfabrication process development, the current availability of new excimer and diode pumped solid state lasers (DPSS) sources are broadening the applications fields of laser microprocessing. Nowadays MEMs, fluidic devices, advanced sensors and biomedical devices and instruments are among the most promising developments of this technology. In this work we present the main features and potential applications of a fully automated 3D laser micromachining workstation based on the main concept of geometrical flexibility. This system integrates two UV laser sources, excimer and DPSS in ns pulse regime, and an advanced positioning system (with six degrees of freedom) for complex parts machining. Different process developments, ranging from pure planar applications to fully 3D parts machining, are also presented.
International
Si
JCR
Si
Title
MICROELECTRON ENG
ISBN
0167-9317
Impact factor JCR
1,503
Impact info
Volume
84
Journal number
0
From page
1337
To page
1340
Month
MAYO
Ranking
Participants

Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Ingeniería y Aplicaciones del Láser
  • Departamento: Física Aplicada a la Ingeniería Industrial
  • Centro o Instituto I+D+i: Centro Laser