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Ponencias en congresos:
Sputtered Al(1-x)ScxN thin films with high areal uniformity for mass production
Año:2015
Áreas de investigación
  • Tecnología electrónica y de las comunicaciones
Datos
Descripción
In this work, we describe a sputter technique enabling deposition of AlScN thin films with homogeneous thickness and composition on production size wafers (150-200 mm) and present some preliminary results on the assessment of the structural and piezoelectric properties of the films with Sc content of about 6.5 at.%. The technique is based on the use of pure Sc ingots embedded into the Al targets of the dual-target S-gun magnetron enabling reactive sputtering with high radial thickness and composition homogeneity. Rutherford backscattering was carried out to obtain the film composition. The microstructure and morphology were assessed by X-ray diffraction. Density was determined by X-ray grazing angle reflectometry. Electroacoustic properties and dielectric constant were derived from the frequency response of BAW test resonators. 1 ?m thick films showed wurtzite structure with pure c-axis orientation and rocking curves of the (00?2) diffraction peak with FWHM as low as 1.5º. Film properties appear to be uniform across 150-mm wafers. The material electromechanical coupling factor reached 9%, although the sound velocity of longitudinal mode was relatively low (around 8500 m/s).
Internacional
Si
Nombre congreso
IEEE Joint Conference IFCS-EFTF
Tipo de participación
970
Lugar del congreso
Denver (Colorado)
Revisores
Si
ISBN o ISSN
DOI
DOI: 10.1109/FCS.2015.7138803
Fecha inicio congreso
12/04/2015
Fecha fin congreso
16/04/2015
Desde la página
1
Hasta la página
4
Título de las actas
Proceedings in IEEE Joint Conference IFCS-EFTF
Esta actividad pertenece a memorias de investigación
Participantes
  • Autor: Valery Felmetsger (OEM Group (USA))
  • Autor: M. Mikhov (OEM Group (USA))
  • Autor: Mario De Miguel Ramos (UPM)
  • Autor: Marta Clement Lorenzo (UPM)
  • Autor: Jimena Olivares Roza (UPM)
  • Autor: Teona Mirea (UPM)
  • Autor: Enrique Iborra Grau (UPM)
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Departamento: Ingeniería Electrónica
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