Memorias de investigación
Research Publications in journals:
Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation
Year:2016
Research Areas
  • Solar cells
Information
Abstract
The phosphosilicate glass (PSG), fabricated by tube furnace diffusion using a POCl3 source, is widely used as a dopant source in the manufacturing of crystalline silicon solar cells. Although it has been a widely addressed research topic for a long time, there is still lack of a comprehensive understanding of aspects such as the growth, the chemical composition, possible phosphorus depletion, the resulting in-diffused phosphorus profiles, the gettering behavior in silicon, and finally the metal-contact formation. This paper addresses these different aspects simultaneously to further optimize process conditions for photovoltaic applications. To do so, a wide range of experimental data is used and combined with device and process simulations, leading to a more comprehensive interpretation. The results show that slight changes in the PSG process conditions can produce high-quality emitters. It is predicted that PSG processes at 860?°C for 60?min in combination with an etch-back and laser doping from PSG layer results in high-quality emitters with a peak dopant density Npeak?=?8.0?×?1018?cm?3 and a junction depth dj?=?0.4?m, resulting in a sheet resistivity?sh?=?380 ?/sq and a saturation current-density J0 below 10 fA/cm2. With these properties, the POCl3 process can compete with ion implantation or doped oxide approaches.
International
Si
JCR
Si
Title
Journal of Applied Physics
ISBN
0021-8979
Impact factor JCR
2,185
Impact info
Volume
119
Journal number
From page
185704-1
To page
185704-9
Month
SIN MES
Ranking
Participants
  • Autor: H. Wagner
  • Autor: A. Dastgheib-Shirazi
  • Autor: B. Min
  • Autor: A.E. Morishige
  • Autor: M. Steyer
  • Autor: G. Hahn
  • Autor: Carlos del Cañizo Nadal UPM
  • Autor: T. Buonassisi
  • Autor: P.P. Altermatt
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Silicio y Nuevos Conceptos para Células Solares
  • Centro o Instituto I+D+i: Instituto de Energía Solar