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Abstract
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| In this work we present the fabrication of a label-free optical biosensor based on SiO2 microstructures lithographed on a silicon (Si) substrate. The fabrication of the microstructures was performed by optical contact lithography, using the commercial photoresist AZ5214E and a selective chemical attack with Buffered Hydrofluoric Acid (BHF). It was studied several parameters of the fabrication process. Topology characterization of the structures was fulfilled by both optical and confocal microscopy and SEM. Finally, an Immunoglobulin G (IgG) and its antibody (aIgG) immunoassay was performed to evaluate the use of the microstructures as an affinity biosensor, using vertical interrogation techniques in order to measure their optical response in the visible range. | |
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Escuela Técnica Superior de Ingenieros Industriales |
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Poster Congreso |