Observatorio de I+D+i UPM

Memorias de investigación
Thin film electroacoustic resonators for physical and chemical sensing
Áreas de investigación
  • Tecnología electrónica y de las comunicaciones
The fields of application of sensing devices are constantly expanding. From industrial processes monitoring to food quality control, sensors play a key role as information collectors, essential for human safeness, costs reduction and efficiency improvement. Their impact is even more pronounced in fields like the healthcare one, where biosensors have become crucial for prognosis and early diagnosis. As a result, high performance, low cost and reliable sensors are more and more demanded. In this context thin film electroacoustic sensors offer high resolution, high sensitivity, simplicity, low size, low manufacturing costs and possibility for array integration. Among this class of devices, thin film bulk acoustic wave resonators (FBARs), and more recently, Lamb wave resonators (LWRs) have attracted considerable attention. In both cases, although their sensing performance in different environments, namely gaseous and liquid, have been already studied, they have still unexplored features or improvement possibilities. This thesis aims at contributing to the field of thin film electroacoustic sensors by expanding the physical and chemical sensing features of AlN-based FBARs, particularly solidly mounted resonators (SMRs), and S0 mode LWR (S0-LWRs).
Tipo de Tesis
Sobresaliente cum laude
Esta actividad pertenece a memorias de investigación
  • Autor: Teona Mirea (UPM)
  • Director: Jimena Olivares Roza (UPM)
  • Director: Enrique Iborra Grau (UPM)
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica
  • Grupo de Investigación: Microsistemas y Materiales Electrónicos
S2i 2023 Observatorio de investigación @ UPM con la colaboración del Consejo Social UPM
Cofinanciación del MINECO en el marco del Programa INNCIDE 2011 (OTR-2011-0236)
Cofinanciación del MINECO en el marco del Programa INNPACTO (IPT-020000-2010-22)