Descripción
|
|
---|---|
This work presents the results of X-ray photoelectron spectroscopy studies on the bonding N configuration in InGaAsN epilayers grown by atmospheric pressure metal organic vapour phase epitaxy. Growth temperature has been tuned in order to obtain both, relaxed and strained layers. The studies were concentrated on analysing the influence of the growth temperature, post growth thermal annealing process and surface quality on the formation of Ga-N and In-N bonds as well as N-related defects. The contamination of InGaAsN films by growth precursor residues and oxides has also been addressed. The growth temperature stands out as a decisive factor boosting In-N bonds ormation, while the thermal annealing seems to affect the N-related defects density in the layers. | |
Internacional
|
Si |
JCR del ISI
|
Si |
Título de la revista
|
Applied Surface Science |
ISSN
|
0169-4332 |
Factor de impacto JCR
|
4,439 |
Información de impacto
|
|
Volumen
|
433 |
DOI
|
10.1016/j.apsusc.2017.10.032 |
Número de revista
|
|
Desde la página
|
1 |
Hasta la página
|
9 |
Mes
|
SIN MES |
Ranking
|