Memorias de investigación
Communications at congresses:
Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators
Year:2018

Research Areas
  • Electronic technology and of the communications

Information
Abstract
In contrast to quartz crystal microbalances, the sensitivity of thin film bulk acoustic wave resonators (FBARs) is strongly dependent on all layers composing the composite structure. Previous studies of the pure mass sensitivity of suspended FBARs, proved that placing low acoustic impedance materials at the sensing surface of the device can enhance their sensitivity by carefully controlling the energy trapping effects. Here we extend those studies by investigating if the in-liquid sensitivity of shear-mode AlN-based solidly mounted resonators (SMRs), working at 2 GHz, display a similar dependence on the device configuration (top electrode thickness and material). We use the finite element method (FEM) and experimental results to demonstrate that if one is restricted by the readout circuit to a certain resonant frequency, the sensitivity of the devices (particularly in-liquid sensors or biosensors) can be boosted by proper design while preserving the initial frequency. This is possible since the variations in sensitivity are strongly dependent on the energy distribution within the whole resonant structure.
International
Si
Congress
2018 European Frequency and Time Forum (EFTF)
960
Place
Turin (Italy)
Reviewers
Si
ISBN/ISSN
978-1-5386-5620-4
10.1109/EFTF.2018.8409014
Start Date
10/04/2018
End Date
12/04/2018
From page
126
To page
129
Proceedings of the 2018 European Frequency and Time Forum (EFTF)
Participants

Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Centro o Instituto I+D+i: Centro de Materiales y Dispositivos Avanzados para Tecnologías de Información y Comunicaciones
  • Departamento: Ingeniería Electrónica