Memorias de investigación
Communications at congresses:
MICROACOUSTIC SENSORS WITH INTEGRATED CARBON NANOTUBES FOR HIGH VOC SENSITIVITY
Year:2019
Research Areas
  • Sensor devices,
  • Other electronic devices,
  • Materials for electric engineering and electronics,
  • Technologies of integration for engineering and electronics,
  • Technology of devices for engineering
Information
Abstract
Electroacoustic resonators have proved to be appropriate candidates as VOC sensors owing to their high mass sensitivity. However, one of their drawbacks is their sensitivity to other external factors like the humidity. Here we propose an AlN-based solidly mounted resonator for VOC detection and humidity discrimination. This ability is achieved by defining different areas within the same device with different resonant characteristics by integrating carbon nanotubes (CNTs) in part of the exposed surface while leaving the other bare. While CNTs act as sensing elements adsorbing VOC molecules, hence originating larger frequency shifts, the bare zone is affected only by the ambient humidity.
International
Si
Congress
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
960
Place
Glasgow, UK
Reviewers
Si
ISBN/ISSN
978-1-7281-2007-2
Start Date
23/06/2019
End Date
27/06/2019
From page
1890
To page
1892
PROCEEDINGS OF THE 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Participants
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Ingeniería Electrónica