Memorias de investigación
Communications at congresses:
A SOLIDLY MOUNTED RESONATOR WITH CMOS-FABRICATED ACOUSTIC MIRROR FOR LOW-COST AIR QUALITY MONITORING
Year:2019

Research Areas
  • Electric component,
  • Microelectronics,
  • Sensor devices,
  • Other electronic devices,
  • Materials for electric engineering and electronics

Information
Abstract
This work presents a novel Solidly Mounted Resonator (SMR) device for use in a portable, low-cost and low power air quality monitor. The acoustic mirror, an essential part of the SMR device for energy confinement, is fabricated within a CMOS process, and advances upon current acoustic device technology. This CMOS-fabricated acoustic mirror will enable the device to be monolithically integrated and fabricated in high volume with reduced post-processing steps compared to the state-of-the-art acoustic based sensors. The CMOS-fabricated acoustic mirror demonstrated good reflectivity with a high quality factor of 500. Experimental results on particulate matter sensing with the CMOS based SMR sensor showed a response of 117 kHz/ng when detecting fine particles (<1 mu m).
International
Si
Congress
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
960
Place
Berlin, Alemania
Reviewers
Si
ISBN/ISSN
978-1-7281-2007-2
Start Date
23/06/2019
End Date
27/06/2019
From page
1242
To page
1245
PROCEEDINGS OF THE 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Participants

Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Ingeniería Electrónica