Memorias de investigación
Communications at congresses:
AlN-based solidly mounted resonators at 400 degrees C: in-situ performance monitoring
Year:2019
Research Areas
  • Sensor devices,
  • Other electronic devices,
  • Materials for electric engineering and electronics,
  • Technology of devices for engineering
Information
Abstract
Acoustic wave sensors, particularly surface acoustic wave (SAW) devices, have been one of the most studied options for high temperature applications. Although they present the big advantage of simple wireless interrogation, they also have disadvantages. These disadvantages include the destructive agglomeration of their metallic thin electrodes. To overcome these issues, AlN-based solidly mounted resonators (SMRs) appear as promising alternatives. Our previous studies have shown they sustain temperatures as high as 1000 degrees C, however their in-situ performance at high temperature during a long period of time has not been performed yet. With this work we continue our previous investigations and we test in real time the performance of SMRs at 400 degrees C during 7 hours.
International
Si
Congress
IEEE International Ultrasonics Symposium (IUS)
960
Place
Glasgow, UK
Reviewers
Si
ISBN/ISSN
1948-5719
Start Date
06/10/2019
End Date
09/10/2019
From page
1700
To page
1702
Proceedings of the IEEE International Ultrasonics Symposium (IUS)
Participants
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Ingeniería Electrónica