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Descripción
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| The electronic feedback used with microcantilevers (mu CLs) to obtain their best performances requires a precise driving method to exert on them a force proportional to an electrical signal. One of these methods is Electrostatic Driving (ED) easily achieved on mu CLs placed some nun apart from a conductive surface. This easy appearance of ED is the reason to find it unexpectedly, coming from electrical fields not properly shielded, in setups designed for other driving as Magnetic Driving (MD). When feedback loops designed for MD suffers from this ED contamination due to an unshielded solenoid for example, the tight phase control of the driving is lost. As a result, self-oscillation of the loop does not take place at f(0), the resonance frequency of the mu CL, or an appealing shift in the resonance frequency from f(0) without feedback to f(FB)=f(0) +/- Delta f with feedback appears in non-oscillating loops. A feedback force proportional to the displacement (DF) or to the speed (SF) of mu CLs has been studied and it is demonstrated that SF sets an apparent temperature for the thermal motion of a mu CL without changing its native f(0) (a desired feature for high stability mu CL-based oscillating sensors) whereas the f(FB) not equal f(0) produced by DF allows an electrical tuning of f(FB) very useful for mu CL-based Voltage Controlled Oscillators. | |
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Internacional
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Si |
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Nombre congreso
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Conference on Smart Sensors, Actuators and MEMS III. SPIE |
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Tipo de participación
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960 |
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Lugar del congreso
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Maspalomas, ESPAÑA |
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Revisores
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Si |
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ISBN o ISSN
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DOI
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Fecha inicio congreso
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02/05/2007 |
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Fecha fin congreso
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04/05/2007 |
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