Descripción
|
|
---|---|
We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors. | |
Internacional
|
Si |
Nombre congreso
|
Micro Total Analysis Systems (muTAS) |
Tipo de participación
|
960 |
Lugar del congreso
|
Gothenburgo (Suecia) |
Revisores
|
Si |
ISBN o ISSN
|
978-0-9798064-1-4 |
DOI
|
|
Fecha inicio congreso
|
12/10/2008 |
Fecha fin congreso
|
16/10/2008 |
Desde la página
|
399 |
Hasta la página
|
401 |
Título de las actas
|
Twelfth International Conference on Miniaturized Systems for Chemistry and Life Sciences |