Memorias de investigación
Research Publications in journals:
Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications
Year:2008
Research Areas
  • Electronics engineering
Information
Abstract
We report the fabrication and frequency characterization of mechanical resonators piezoelectrically actuated with aluminum nitride films. The resonators consist of a freestanding unimorph structure made up of a metal/AlN/metal piezoelectric stack and a Si3N4 supporting layer. We show that the electrical impedance of the one-port device can be used to assess the vibrational behavior of the resonators, provided that the modes do not exhibit specific symmetries, for which the impedance variations cancel. Frequency shifts arise when loading the resonators with small masses. As gravimetric sensors, the microbridges exhibit mass sensitivities of 0.18 fg/Hz for vibrational modes around 2 MHz.
International
Si
JCR
Si
Title
APPLIED PHYSICS LETTERS
ISBN
0003-6951
Impact factor JCR
3,596
Impact info
Volume
92
00036951
Journal number
18
From page
183506-1
To page
183506-3
Month
MAYO
Ranking
Participants
Research Group, Departaments and Institutes related
  • Creador: Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Sistemas Electrónicos y de Control
  • Departamento: Tecnología Electrónica
  • Departamento: Ingeniería Electrónica