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Descripción
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| We report a method that enables the combination of integrated optical systems with on-chip fluid handling for chemical analysis, without compromising the functionality of either part. Utilizing a selective isotropic plasma etch of a sacrificial chromium etch-stop layer, fluidic connections can be made down to buried nanostructured optical sensing elements in a controlled manner. We describe the fabrication method and present an example application to a label-free assay of protein concentration based on optical slot-waveguide micro-ring resonator refractive index sensors. | |
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Internacional
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Si |
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DOI
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Edición del Libro
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0 |
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Editorial del Libro
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ISBN
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978-0-9798064-1-4 |
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Serie
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Título del Libro
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Twelfth International Conference on Miniaturized Systems for Chemistry and Life Sciences |
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Desde página
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399 |
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Hasta página
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401 |