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Memorias de investigación
Artículos en revistas:
Combined grazing incidence RBS and TEM analysis of luminescent nano-SiGe/SiO2 multilayers
Año:2008
Áreas de investigación
  • Industria electrónica
Datos
Descripción
Multilayer structures with five periods of amorphous SiGe nanoparticles/SiO2 layers with different thickness were deposited by Low Pressure Chemical Vapor Deposition and annealed to crystallize the SiGe nanoparticles. The use of grazing incidence RBS was necessary to obtain sufficient depth resolution to separate the signals arising from the individual layers only a few nm thick. The average size and areal density of the embedded SiGe nanoparticles as well as the oxide interlayer thickness were determined from the RBS spectra. Details of eventual composition changes and diffusion processes caused by the annealing processes were also studied. Transmission Electron Microscopy was used to obtain complementary information on the structural parameters of the samples in order to check the information yielded by RBS. The study revealed that annealing at 900 C for 60 s, enough to crystallize the SiGe nanoparticles, leaves the structure unaltered if the interlayer thickness is around 15 nm or higher.
Internacional
Si
JCR del ISI
Si
Título de la revista
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIO
ISSN
0168-583X
Factor de impacto JCR
0,997
Información de impacto
Volumen
266
DOI
Número de revista
0
Desde la página
1397
Hasta la página
1401
Mes
ENERO
Ranking
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Participantes
  • Participante: A Kling
  • Participante: J.C. Soares
  • Autor: Jesus Sangrador Garcia (UPM)
  • Autor: Tomas Rodriguez Rodriguez (UPM)
  • Participante: M.I. Ortiz
  • Autor: Andres Rodriguez Dominguez (UPM)
  • Participante: C Ballesteros
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
  • Creador: Departamento: Tecnología Electrónica
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