Abstract
|
|
---|---|
International
|
Si |
JCR
|
Si |
Title
|
MICROELECTRONIC ENGINEERING |
ISBN
|
0167-9317 |
Impact factor JCR
|
1,569 |
Impact info
|
|
Volume
|
87 |
|
10.1016/j.mee.2009.09.007 |
Journal number
|
4 |
From page
|
663 |
To page
|
667 |
Month
|
SIN MES |
Ranking
|