Memorias de investigación
Research Publications in journals:
Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems
Year:2010

Research Areas

Information
Abstract
International
Si
JCR
Si
Title
THIN SOLID FILMS
ISBN
0040-6090
Impact factor JCR
1,909
Impact info
Volume
518
10.1016/j.tsf.2010.03.013
Journal number
18
From page
5128
To page
5133
Month
SIN MES
Ranking
Participants

Research Group, Departaments and Institutes related
  • Creador: No seleccionado
  • Grupo de Investigación: Microsistemas y Materiales Electrónicos
  • Departamento: Tecnología Electrónica