Memorias de investigación
Research Publications in journals:
Super-High-Frequency SAW Resonators on AlN/Diamond
Year:2012

Research Areas
  • Engineering

Information
Abstract
This letter describes the procedure to manufacture high-performance surface acoustic wave (SAW) resonators on AlN/diamond heterostructures working at frequencies beyond 10 GHz. In the design of SAW devices on AlN/diamond systems, the thickness of the piezoelectric layer is a key parameter. The in- ?uence of the ?lm thickness on the SAW device response has been studied. Optimized thin ?lms combined with advanced e-beam lithographic techniques have allowed the fabrication of one-port SAW resonators with ?nger width and pitch of 200 nm operating in the 10?14 GHz range with up to 36 dB out-of-band rejection.
International
Si
JCR
Si
Title
Electron Device Letters
ISBN
0741-3106
Impact factor JCR
0
Impact info
Volume
33
Journal number
4
From page
495
To page
497
Month
SIN MES
Ranking
Participants

Research Group, Departaments and Institutes related
  • Creador: Departamento: Ingeniería Electrónica