Artículos en revistas:
Super-High-Frequency SAW Resonators on AlN/Diamond
Año:2012
Áreas de investigación
- Ingenierías
Datos
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Descripción
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| This letter describes the procedure to manufacture high-performance surface acoustic wave (SAW) resonators on AlN/diamond heterostructures working at frequencies beyond 10 GHz. In the design of SAW devices on AlN/diamond systems, the thickness of the piezoelectric layer is a key parameter. The in- ?uence of the ?lm thickness on the SAW device response has been studied. Optimized thin ?lms combined with advanced e-beam lithographic techniques have allowed the fabrication of one-port SAW resonators with ?nger width and pitch of 200 nm operating in the 10?14 GHz range with up to 36 dB out-of-band rejection. | |
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Internacional
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Si |
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JCR del ISI
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Si |
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Título de la revista
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Electron Device Letters |
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ISSN
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0741-3106 |
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Factor de impacto JCR
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0 |
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Información de impacto
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Volumen
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33 |
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DOI
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Número de revista
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4 |
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Desde la página
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495 |
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Hasta la página
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497 |
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Mes
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SIN MES |
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Ranking
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Participantes
- Autor: Juan Rodriguez Madrid UPM
- Autor: Gonzalo Fuentes Iriarte UPM
- Autor: Jorge Pedros Ayala UPM
- Autor: O. A. Williams Fraunhofer Institute for Applied Solid State Physics (IAF)
- Autor: D. Brink Fraunhofer Institute for Applied Solid State Physics (IAF)
- Autor: Fernando Calle Gomez UPM
Grupos de investigación, Departamentos, Centros e Institutos de I+D+i relacionados
- Creador: Departamento: Ingeniería Electrónica