Site card
Continous-flow high-temperature furnace Lindberg 54S977M 1200
Where:
Centre of Advanced Materials and Devices for Information and Communications Technology (CEMDATIC)
Ubicación:
ETSI de Telecomunicación, A301L / Cámara Limpia
Typology:
Equipamiento científico-Tecnológico
Manager: Ricardo Hervás García
Email:
Quartz tube high-temperature furnace for heat treatments under difefrent ambients.
Microelectronics, Photonics, Micro and Nano-Technology
Programmable furnace for high-temperture processes
Maximum temperature: 1,200 ºC (2,192 ºF, 1,473 ºK).
Number of independent control zones : 3
K-type thermocouple
Quartz tube dimesions: diameter 9.00 in (22.86 cm), length 36.00 in (91.44 cm).
Power: 22,500 W
Available gas: O2, Ar, N2.
Wet and dry oxidation of silicon
Silicon nitridation
Contact sintering
Post-implantation impurity activation
Digital, Industry and Space
Health
Environment
Energy and mobility
